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Nanofabrication Cleanroom Home | Nanofabrication Cleanroom Facility

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. Submitted by Anonymous on Fri, 2010-05-14 08:12. Architectural rendering of cleanroom courtesy of HALFF Associates, Inc. The UNT Nanofabrication Cleanroom. Electron Beam Lithography/Scanning Electron Microscope. Ion Assist Electon Beam and Sputtering Combo Thin Film Deposition System. Thermal Evaporation Thin Film Deposition System. Heidelberg DWL 66s Maskless Laser Lithography System. State of Texas Online.

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Nanofabrication Cleanroom Home | Nanofabrication Cleanroom Facility | nanofabrication.unt.edu Reviews
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Center for Research and Advanced Technology (CART). Office of Research and Economic Development. Submitted by Anonymous on Fri, 2010-05-14 08:12. Architectural rendering of cleanroom courtesy of HALFF Associates, Inc. The UNT Nanofabrication Cleanroom. Electron Beam Lithography/Scanning Electron Microscope. Ion Assist Electon Beam and Sputtering Combo Thin Film Deposition System. Thermal Evaporation Thin Film Deposition System. Heidelberg DWL 66s Maskless Laser Lithography System. State of Texas Online.
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Nanofabrication Cleanroom Home | Nanofabrication Cleanroom Facility | nanofabrication.unt.edu Reviews

https://nanofabrication.unt.edu

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. Submitted by Anonymous on Fri, 2010-05-14 08:12. Architectural rendering of cleanroom courtesy of HALFF Associates, Inc. The UNT Nanofabrication Cleanroom. Electron Beam Lithography/Scanning Electron Microscope. Ion Assist Electon Beam and Sputtering Combo Thin Film Deposition System. Thermal Evaporation Thin Film Deposition System. Heidelberg DWL 66s Maskless Laser Lithography System. State of Texas Online.

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nanofabrication.unt.edu nanofabrication.unt.edu
1

Tools and Instruments | Nanofabrication Cleanroom Facility

http://nanofabrication.unt.edu/tools-and-instruments-0

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. The UNT Nanofabrication Cleanroom has a wide selection of processing tools, including dual e-Beam, thermal evaporation and sputtering systems for thin film development, and two RIE systems for metal and dielectric material etching of MEMS structures. For current availible tools, please check Tool Status. For tool scheduling, please check UNT FOM. AGS Plasma Systems, Inc. RIE MPS-150. University of North Texas.

2

User Information | Nanofabrication Cleanroom Facility

http://nanofabrication.unt.edu/user-information

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. How to Become a Cleanroom User. Cleanroom User Manual and Safety Protocol. Cleanroom Tool Standard Operating Procedures (SOP). Cleanroom User Fee Schedule. UNT Discovery Park Cleanroom. University of North Texas. 3940 North Elm, E-151-152. UNT Discovery Park, 3940 North Elm, E-151. Http:/ nanofabrication.unt.edu/. Have questions on content or technical issues? Please contact us. jianchao.li@unt.edu.

3

About | Nanofabrication Cleanroom Facility

http://nanofabrication.unt.edu/about

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. UNT Logo by EBL. The cleanroom is located in the E-wing of Discovery Park. Room E151-152, adjacent to the Center for Advanced Research and Technology. For information about cleanroom capabilities or other details, contact Dr. Jianchao Li. Nanofabrication Facilities Manager. More information will be posted here as it becomes available. Updated Cleanroom Capacity examples! UNT Discovery Park Cleanroom.

4

News Updates | Nanofabrication Cleanroom Facility

http://nanofabrication.unt.edu/nano-news

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. New Laurell chemcial processing stations are online! Developing and Etching processes for 4"-5" Photomask. Lift Off process for 3"-4" Wafers. New Trovato Organic Depositon. UNT Discovery Park Cleanroom. University of North Texas. 3940 North Elm, E-151-152. UNT Discovery Park, 3940 North Elm, E-151. Http:/ nanofabrication.unt.edu/. Have questions on content or technical issues? UNT Health Science Center.

5

Nanofabrication Cleanroom Home | Nanofabrication Cleanroom Facility

http://nanofabrication.unt.edu/home

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. Submitted by Anonymous on Fri, 2010-05-14 08:12. Architectural rendering of cleanroom courtesy of HALFF Associates, Inc. The UNT Nanofabrication Cleanroom. Electron Beam Lithography/Scanning Electron Microscope. Ion Assist Electon Beam and Sputtering Combo Thin Film Deposition System. Thermal Evaporation Thin Film Deposition System. Heidelberg DWL 66s Maskless Laser Lithography System. State of Texas Online.

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cart.research.unt.edu cart.research.unt.edu

Directory | Center for Advanced Research & Technology

https://cart.research.unt.edu/directory

Center for Advanced Research and Technology. Office of Research and Innovation. Professor and Advisory Committee Chair. Department of Materials Science and Engineering. Oliver M.R. Chyan. Regents Professor and CENG Associate Dean of Undergraduate Studies. Department of Mechanical and Energy Engineering. Professor and Associate Chair. Department of Engineering Technology. Department of Materials Science and Engineering. Professor and Department Chair. Department of Materials Science and Engineering.

cart.research.unt.edu cart.research.unt.edu

About | Center for Advanced Research & Technology

https://cart.research.unt.edu/about

Center for Advanced Research and Technology. Office of Research and Innovation. CART is housed in Discovery Park,. UNT’s off-site campus for the College of Engineering, the College of Information and premier research facilities focused on advancing research and economic development through industry-university partnerships. Outside collaborators include Sandia National Laboratory, Los Alamos National Laboratory, Texas Instruments, Lockheed Martin, Semiconductor Research Corporation, Pratt and Whitney, Ohi...

cart.research.unt.edu cart.research.unt.edu

Citing CART | Center for Advanced Research & Technology

http://cart.research.unt.edu/citing-cart

Center for Advanced Research and Technology. Office of Research and Innovation. Acknowledgement of contributions that the CART facility and staff make to publications is encouraged as they enable us to demonstrate our involvement in the research of a large number of laboratories, aiding the support of current equipment and procurement of future equipment. Below are suggestions of standard methods of acknowledging CART. Significant intellectual contribution to the design of the published experiments.

cart.research.unt.edu cart.research.unt.edu

Fees | Center for Advanced Research & Technology

http://cart.research.unt.edu/fees

Center for Advanced Research and Technology. Office of Research and Innovation. Internal Equipment Rates for UNT. Rates for External Non-Profit Organizations. Rates for External Commercial Customers. Center for Advanced Research and Technology. 3940 North Elm Street, Suite E-178. Discovery Park Suite E-178. Http:/ cart.research.unt.edu/. Have questions on content or technical issues? Please contact us. David.Jaeger@unt.edu. UNT Health Science Center. Site last updated on: December 18, 2016.

cart.research.unt.edu cart.research.unt.edu

Publications | Center for Advanced Research & Technology

https://cart.research.unt.edu/publications

Center for Advanced Research and Technology. Office of Research and Innovation. For a comprehensive list of publications referencing the CART facilities please see CART Publications.docx. Publications Published in 2015. Choudhuri, D., T. Alam, T. Borkar, B. Gwalani, A. S. Mantri, S. G. Srinivasan, M. A. Gibson, and R. Banerjee. " Formation of a Huesler-like L2 1 phase in a CoCrCuFeNiAlTi high-entropy alloy. Metallurgical and Materials Transactions A. 46, no. 10 (2015): 4661-4668. Rimal, Sirish, Tamal Muk...

cart.research.unt.edu cart.research.unt.edu

Services | Center for Advanced Research & Technology

http://cart.research.unt.edu/services

Center for Advanced Research and Technology. Office of Research and Innovation. In 2012 CART was moved into a new 5500 sq. ft. space that physically centralized CART functions and co-located it with a clean room. This centralization of instruments and facilities allows for the seamless and contiguous transfer of novel materials and devices synthesized in the Clean Room. Directly to advanced characterization instruments in CART. For more information watch the CART facilities video. State of Texas Online.

cart.research.unt.edu cart.research.unt.edu

Mission | Center for Advanced Research & Technology

http://cart.research.unt.edu/mission

Center for Advanced Research and Technology. Office of Research and Innovation. Center for Advanced Research and Technology. 3940 North Elm Street, Suite E-178. Discovery Park Suite E-178. Http:/ cart.research.unt.edu/. Have questions on content or technical issues? Please contact us. David.Jaeger@unt.edu. UNT Health Science Center. Site last updated on: December 18, 2016. State of Texas Online.

cart.research.unt.edu cart.research.unt.edu

Access and Training | Center for Advanced Research & Technology

https://cart.research.unt.edu/access-and-training

Center for Advanced Research and Technology. Office of Research and Innovation. Internal Users - UNT faculty, staff and students:. Several options are available to UNT faculty, staff and students if they would like to gain access to CART instrumentation:. Enroll in the class and laboratory covering the appropriate technique. At the end of the course successfully demonstrate safe equipment operation procedures in a test given by the manager of the equipment. Or contact David Jaeger. CART Sample Analysis R...

cart.research.unt.edu cart.research.unt.edu

Instrument Scheduling | Center for Advanced Research & Technology

http://cart.research.unt.edu/instrument-scheduling

Center for Advanced Research and Technology. Office of Research and Innovation. FOM User Manual for New UNT Users. FIB and SEM usage policies. Contact the Facilities Manager. You can cancel your reservation online up to 4 hours in advance. If you must cancel your reservation after that time, please contact us by email. Or by phone at 940-369-8106, or stop by E-178 at Discovery Park. Center for Advanced Research and Technology. 3940 North Elm Street, Suite E-178. Discovery Park Suite E-178.

cart.research.unt.edu cart.research.unt.edu

News | Center for Advanced Research & Technology

http://cart.research.unt.edu/news-0

Center for Advanced Research and Technology. Office of Research and Innovation. Completion of the CART Lab Renovation. CART is pleased to announce the completion of its renovation in August 2013. The modernized facility is an open access ‘one stop shop’ for novel research and training activities. Key areas of renovation include. 1) the consolidation of instruments into one location to enhance collaborations and the efficiency of research,. Center for Advanced Research and Technology. Have questions on co...

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Nanofabrication Cleanroom Home | Nanofabrication Cleanroom Facility

Center for Research and Advanced Technology (CART). Office of Research and Economic Development. Submitted by Anonymous on Fri, 2010-05-14 08:12. Architectural rendering of cleanroom courtesy of HALFF Associates, Inc. The UNT Nanofabrication Cleanroom. Electron Beam Lithography/Scanning Electron Microscope. Ion Assist Electon Beam and Sputtering Combo Thin Film Deposition System. Thermal Evaporation Thin Film Deposition System. Heidelberg DWL 66s Maskless Laser Lithography System. State of Texas Online.

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