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φetch. simulation of feature scale profile evolution during plasma etching | phietch.org Reviews
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Institute of Microelectronics - Programs
http://imel.demokritos.gr/software.shtml
Welcome to the Department of Microelectronics. IMEL) / IAMPPMN / NCSR Demokritos. IMEL at a glance. Nanotechnology and MEMS laboratory:. Software developed at IMEL. Software tools developed at the Institute of Microelectronics are listed below and are available for evaluation upon request. Software for Line Width Roughness (LWR) Analysis. The program LWR Demokritos (LERDEMO) aims at:. A) The detection of the edges of resist lines by analyzing their top-down SEM images. Micro and nano topography evolution.
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Phi Eta Sigma National Honor Society, Inc. for First Year Collegiate Students
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φetch. simulation of feature scale profile evolution during plasma etching
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