rfast.esi.nagoya-u.ac.jp
名古屋大学 先端技術共同研究施設名古屋大学 先端技術共同研究施設
http://rfast.esi.nagoya-u.ac.jp/
名古屋大学 先端技術共同研究施設
http://rfast.esi.nagoya-u.ac.jp/
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名古屋大学 先端技術共同研究施設 | rfast.esi.nagoya-u.ac.jp Reviews
https://rfast.esi.nagoya-u.ac.jp
名古屋大学 先端技術共同研究施設
名古屋大学 先端技術共同研究施設
http://www.rfast.esi.nagoya-u.ac.jp/equipment3.html
Research Facility for Advanced Science and Technology. また,層厚制御機構により,[Pt(1.2 nm)/Co(0.3 nm)] 20周期などの多層構造膜も作成可能です。 図1は,光リソグラフィで形成した電極パターン 幅100μm の中央部分に120 180 nm 2のスピン注入素子の接合部分を電子線リソグラフィにより形成した例を示しています。 受付時間: 平日 AM 10:00 PM 4:00.
名古屋大学 先端技術共同研究施設
http://www.rfast.esi.nagoya-u.ac.jp/access.html
Research Facility for Advanced Science and Technology. 地下鉄東山線 名古屋 駅より 藤ヶ丘 行に乗車、. 本山 駅より 地下鉄名城線に乗り換え、 名古屋大学 駅下車. 東名高速道路 名古屋I.C より、. 受付時間: 平日 AM 10:00 PM 4:00.
名古屋大学 先端技術共同研究施設
http://www.rfast.esi.nagoya-u.ac.jp/equipment2.html
Research Facility for Advanced Science and Technology. RF電源 500 W 2台. 対応膜厚 1 µm 600 µm. 試料台サイズ 220 x 220 mm. 粒子径 5 µm 15 µm. 基板加熱 抵抗加熱式 ( 400 ). 高周波電源 最大300 W 13.56 MHz,水晶制御式. 供給ガス TEOS, O2,CF4. 加速電圧 25 / 50 / 100kV. ビーム電流 100 pA - 2 nA. SUSS Micro Tec AG社製 MJB-3. 最大ウェーハサイズ 3 inch 吸引モード ,4 inch ソフトコンタクト. 照射範囲 3 3 inch. 対応基板厚さ 4.5 mm. AG Associates社製 Heatpulse 610. 光源 1041 nm, 550 fs, 10 µJ (IMRA µjewel D-1000). 高調波発生ユニット 40% @520 nm, 5% @347 nm. 最大試料寸法 100 mm x 100 mm. 加工スポット 3.5 µmφ. 加速電圧 0.5 30kV.
名古屋大学 先端技術共同研究施設
http://www.rfast.esi.nagoya-u.ac.jp/equipment.html
Research Facility for Advanced Science and Technology. 名古屋大学 未来材料 システム研究所 先端技術共同研究施設. Research Facility of Advanced Science and Technology Nagoya University. 下の写真は,デバイスプロセス室 クリーンルーム301平米,クラス10,000 の写真を示しています。 下の写真は,イエローライトの微細加工室 クリーンルーム98平米,クラス1,000 を示しており,この部屋には,複数のマスクアライナ 片面 両面 ,スピンコーター,スプレーコーター,ベーク炉,FE-SEM,表面粗さ計などが設置されている 装置配置図. 下側の写真に示すマスク室 クリーンルーム27平米,クラス1,000 には,100kVの電子線描画装置が設置されており,ナノメートルレベルのパターンの描画が可能となっています。 受付時間: 平日 AM 10:00 PM 4:00.
名古屋大学 先端技術共同研究施設
http://www.rfast.esi.nagoya-u.ac.jp/event.html
Research Facility for Advanced Science and Technology. テーマ 交流が生み出す新たな飛躍 環境 安全 モノづくり. 主 催 メッセナゴヤ実行委員会(構成団体 愛知県、名古屋市、名古屋商工会議所). Http:/ www.messenagoya.jp/. 主 催 BioJapan 組織委員会、株式会社ICSコンベンションデザイン. Http:/ www.ics-expo.jp/biojapan/main/report.html. 受付時間: 平日 AM 10:00 PM 4:00.
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名古屋大学 先端技術共同研究施設
Research Facility for Advanced Science and Technology. 装置一覧 イベント 講習会/説明会 を更新しました。 受付時間: 平日 AM 9:00 PM 4:00.
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